Do more with one link - claim and personalize your FREE link today! Effortlessly schedule, video meet, message chat, network, share materials, e-sign, etc – all in one spot. Collaborate, Nurture connections, Improve client services, Expedite deal closures, and more. Join FREE!!
Cross-sectional TEM images and energy-dispersive x-ray measurements from high-angle annular dark-field scanning TEM for different thin films. (A) Pure HfOx deposited at 400°C. Clear crystallites are visible in the film; red arrows indicate some of the grain boundaries. (B) Pure HfOx deposited at 30°C. While these films are not polycrystalline like pure HfOx deposited at 400°C, neither are they as uniform as the composite films presented in (C). (C) The thin films which resulted in stable electrical performance are amorphous or nanocrystalline. Some pillar-like structures can be discerned, indicated by red arrows. The addition of Ba to the films clearly leads to material uniformity by suppressing crystallization...Read More
Recent Comments