Microelectromechanical systems tagged posts

Progress in the development of highly reliable and sensitive diamond MEMS sensors. A NIMS-led research group succeeded in developing a high-quality diamond cantilever with among the highest quality (Q) factor values at room temperature ever achieved. The group also succeeded for the first time in the world in developing a single crystal diamond microelectromechanical systems (MEMS) sensor chip that can be actuated and sensed by electrical signals. These achievements may popularize research on diamond MEMS with significantly higher sensitivity and greater reliability than existing silicon MEMS.

MEMS sensors – in which microscopic cantilevers (projecting beams fixed at only one end) and electronic circuits are int...

New MIT research could offer a way of making tiny movable parts with no solid connections between the pieces, potentially eliminating a major source of wear and failure in microelectromechanical machines. The new system uses a layer of liquid droplets to support a tiny, movable platform. Credit: Daniel Preston/Device Research Lab

A platform floating on tiny droplets, using hydrophobic and hydrophilic surfaces, could provide precise motion control for optical devices, MEMS and other systems. Microelectromechanical systems, or MEMS, are tiny machines fabricated using equipment and processes developed for the production of electronic chips and devices...